silicon fusion bonding

з’єднання кремнієвих пластин методом сплавлення. Технологія з’єднання гідрофілізованих підкладок, зроблених з Si, окисленого кремнію і т.д. первиним водневим зв’язком між поверхнями і потім зв’язком Si-O-Si після відпалу при високій температурі

English-Ukrainian dictionary of microelectronics. 2013.

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